SCANLAB AG's product palette now includes the intelliSCANse® series of scan heads, with 10mm and 14mm apertures. Featuring the new dynAXISse® galvanometer scanners with digital encoders, these new intelliSCANse® scan heads set worldwide standards for ultra-accurate scanning at high throughput, as required for electronic component manufacturing and other precision applications. They offer:
• Superb accuracy for microstructuring, e.g. display manufacturing and semiconductor processing
• dynAXISse®galvanometer scanners with top dynamic performance for maximized throughput and productivity
• Lowest drift for highest processing accuracy under varying environmental/processing conditions
• Full flexibility of the intelliSCAN® scan head series with switchable tunings and an assortment of cooling and mechanical options
• Proven dependability of the entire intelliSCAN® series
Interferometric position sensing by SCANLAB's newly developed dynAXISse® galvanometer scanners ensures excellent resolution along with lowest dither and drift. SCANLAB's patented, ultra-low-inertia design makes intelliSCANse® 10 the fastest, most accurate 10-mm-aperture scan head currently available. To top it off, the new intelliSCANse® 10 and intelliSCANse® 14 scan heads have an outstanding price/performance ratio.
• Superb accuracy for microstructuring, e.g. display manufacturing and semiconductor processing
• dynAXISse®galvanometer scanners with top dynamic performance for maximized throughput and productivity
• Lowest drift for highest processing accuracy under varying environmental/processing conditions
• Full flexibility of the intelliSCAN® scan head series with switchable tunings and an assortment of cooling and mechanical options
• Proven dependability of the entire intelliSCAN® series
Interferometric position sensing by SCANLAB's newly developed dynAXISse® galvanometer scanners ensures excellent resolution along with lowest dither and drift. SCANLAB's patented, ultra-low-inertia design makes intelliSCANse® 10 the fastest, most accurate 10-mm-aperture scan head currently available. To top it off, the new intelliSCANse® 10 and intelliSCANse® 14 scan heads have an outstanding price/performance ratio.
