RASIRC®, the steam purification company, announced that the Steamer Turbo has won the prestigious Golden Gas Award for innovation in specialty gas delivery. The Steamer Turbo is the first RASIRC Steamer with integrated gas blending control, solving the difficult problem of condensation when blending steam with compressed gases. Delivering high flow rates of steam combined with nitrogen or oxygen, the Steamer Turbo improves uniformity of thin wet thermal oxide films for 300mm and larger furnaces (white paper available at http://www.rasirc.com/regpages/papers.php?nn=ThinOxide). RASIRC products deliver patented ultrapure water vapor for semiconductor, photovoltaics, nanotechnology, and other manufacturing applications.
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