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Süss MicroTec AG Schleissheimer Str. 90 85748 Garching b. München, Germany http://www.suss.com
Contact Ms Julia Hartmann +49 89 32007161
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Süss MicroTec AG

SÜSS MicroTec bringt 300 mm Coat / Develop Cluster für 3DIntegration auf den Markt

(PresseBox) (Garching b. München, )
Anlässlich der Semicon Korea 2009 hat SÜSS MicroTec die zweite Generation des ACS300, eines modularen Systems für die Belackung, Härtung und Entwicklung von Wafern bis 300 mm, vorgestellt. Der ACS300 Gen2 bietet eine hohe Konfigurationsflexibilität bei gleichzeitig besonders attraktiven Betriebskosten. Systemaufbau und Prozessmodule wurden eigens auf die Anforderungen des Advanced Packaging und der 3D-Integration zugeschnitten, bei der Fotolackschichten mit einer Dicke von bis zu 100 Mikron bearbeitet werden. Die Kombination der höchsten derzeit auf dem Markt erhältlichen Belackungs- und Entwicklungskonformität mit außergewöhnlichen Randbearbeitungsfähigkeiten machen den ACS300 Gen2 zur optimalen Lösung für verschiedenste Spin Coating-Anwendungen. Hierzu gehören unter anderem fotosensible Polymere dnc Dkwyuzyf, XXH jylx ZugzydzvJN (UDT).

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The publisher indicated in each case (see company info by clicking on image/title or company info in the right-hand column) is solely responsible for the stories above, the event or job offer shown and for the image and audio material displayed. As a rule, the publisher is also the author of the texts and the attached image, audio and information material. The use of information published here is generally free of charge for personal information and editorial processing. Please clarify any copyright issues with the stated publisher before further use. In case of publication, please send a specimen copy to service@pressebox.de.