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Vistec Semiconductor Systems GmbH Kubacher Weg 4 35781 Weilburg, Germany http://www.vistec-semi.com
Contact Ms Heike Engstler +49 7131 2039941
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Vistec Semiconductor Systems GmbH

Vistec Lithography präsentiert VB300 – das ideale System für Nanolithographie in Produktion und Forschung

(PresseBox) (Cambridge, UK, )
Vistec Lithography Ltd. in Cambridge, UK (ehemals Leica Microsystems Lithography) erhielt bereits im Vorfeld der Semicon Europa Aufträge für die neue VB300. Die VB300 ist die jüngste Weiterentwicklung der erfolgreichen hochauflösenden Vectorbeam-Serie.

Die VB300 zielt auf Nanolithografie Elektronenstrahl-Direktschreiben ebenso wie auf die kommende Generation von Maskenapplikationen. Dabei kann das System Teilstücke von 5mm Größe bis hin zu kompletten 300mm Wafern verarbeiten sowie die zugehörigen Maskengrößen.

Die VB300 greift die bewährten Eigenschaften ihres Vorgängers VB6-UHR EWF auf. So etwa die 100kV TFE Säule mit hoher Stromdichte, einen 50 MHz / 20 bit intelligenten Ablenkgenerator, eine hohe Feldgrößen-Fähigkeit von 1,2mm bei 50 apf 216 kD Pjjacuz, ulkdv dah Uriweesxn, Pssyfcljms kmvdwbf 98im lp otrcwkwn.
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