Thanks to its bi-directional calorimetric measurement, the SFS Flow Module provides fast, continuous gas flow monitoring with a response time ≤ 20 ms. It comes factory-linearized with a repeatability of 0.2 % and an accuracy of up to 2 % f.s. and is available in three versions for different flow rates +/-50 sccm, +/-200 sccm and +/-1000 sccm. The flow module has both, an analog and a digital I2C output and is equipped with two address pins. Another advantage of the new SFS Flow Module is its compact design. With an installation space of only 50 x 40 x 20 mm, it is sufficiently small for integration into a measuring unit.
Fast-response and continuous gas flow monitoring with the new SFS Flow Module made by IST AG
Innovative Sensor Technology IST AG expands its product portfolio with a new module. The SFS Flow Module is a ready-to-use, linearized mass flow module for gases.
Thanks to its bi-directional calorimetric measurement, the SFS Flow Module provides fast, continuous gas flow monitoring with a response time ≤ 20 ms. It comes factory-linearized with a repeatability of 0.2 % and an accuracy of up to 2 % f.s. and is available in three versions for different flow rates +/-50 sccm, +/-200 sccm and +/-1000 sccm. The flow module has both, an analog and a digital I2C output and is equipped with two address pins. Another advantage of the new SFS Flow Module is its compact design. With an installation space of only 50 x 40 x 20 mm, it is sufficiently small for integration into a measuring unit.