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Laser Components Germany GmbH Werner-von-Siemens-Str. 15 82140 Olching, Germany http://www.lasercomponents.com/de
Contact Mr Stephan Börner +49 8142 2864702

Interference Filters for Photolithography

New Products

(PresseBox) (Olching, )
Photolithographic filters are used in applications with LSI and LCD steppers in which high-power mercury vapor lamps are used for illumination. The very narrow-band bandpass filters produce an almost monochromatic radiation. This allows the best possible resolution to be achieved in the target.

LASER COMPONENTS' partner Omega Optical has revised its i-line bandpass filters. The filter designs are now available based on dual magnetron reactive sputtering coating. This significantly improves both the intensity of the i-line and its homogeneity in the photolithographic process.

There is one new product from Omega that is particularly interesting for MEMS production: MicroChem, the manufacturer of the SU-8 photo resist, recommends UV radiation below 350 nm to be blocked in order to produce particularly perpendicular structures. With this in mind, the PL-360-LP from the mask aligner series can be particularly recommended!

All filters are available from LASER COMPONENTS.

More Information http://www.lasercomponents.com/...

Laser Components Germany GmbH

LASER COMPONENTS is specialized in the development, manufacture, and sale of components and services for the laser and opto-electronics industries. With sales offices in four different countries, the company has served its customers since 1982. In-house production at six locations in Germany, Canada, and the USA began in 1986 and is meanwhile responsible for about half of its turnover. Currently, the family-run business employs more than 130 people worldwide.

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The publisher indicated in each case (see company info by clicking on image/title or company info in the right-hand column) is solely responsible for the stories above, the event or job offer shown and for the image and audio material displayed. As a rule, the publisher is also the author of the texts and the attached image, audio and information material. The use of information published here is generally free of charge for personal information and editorial processing. Please clarify any copyright issues with the stated publisher before further use. In case of publication, please send a specimen copy to service@pressebox.de.