With the PIMag® V-522, V-524 and V-528 ranges, there are now new ultracompact linear stages, which reach the highest velocities up to 250 mm/s and scanning frequencies of some 10 Hz. The friction-free drive works with travel ranges from 5, 10 or 20 mm and is particularly suitable for applications in industry and research that require 24/7 operation, for example, in metrology, photonics, for image stabilization systems as well as in semiconductor and flat-screen inspection.
Thanks to its crossed roller guides, the linear stage attains a travel accuracy of 1 µm. Cage creep is also reliably prevented (anti creep). The linear stage is connected to the controller via a single cable, which includes both the power and the encoder signal. This ensures easy and space-saving integration into customer systems. The integrated, direct-measuring, optical linear encoder allows a reliable position control and repeatability of ±500 nm.
The sensor resolution is less than 10 nm; the minimum incremental motion is 20 nm. Depending on the version, the Voice-Coil Direct Drive series has a travel range of 5, 10 or 20 mm and is also only 80 mm in width and 26 mm in height. If required, it is also possible to com-bine linear stages without spacer plates to multi-axis systems. On the basis of the PIMag® standard linear stages, PI is able to offer customized single- and multi-axis solutions, which can be adapted exactly to the application with respect to force, accuracy and foot-print.
For more information, refer to:
http://www.physikinstrumente.com/product-detail-page/v-522-v-524-v-528-1200206.html